| 000 | 00751cam a2200205 a 4500 | ||
|---|---|---|---|
| 999 |
_c330175 _d330175 |
||
| 020 | _a3527302573 | ||
| 082 | 0 | 4 | _a621.38152 |
| 100 | 1 | _aKorvink, J. G. | |
| 245 | 1 | 0 |
_aSemiconductors for micro- and nanotechnology : _ban introduction for engineers / _cJan G. Korvink and Andreas Greiner. |
| 260 |
_aWeinheim : _bWiley-VCH, _cc2002. |
||
| 300 |
_a340 p. : _bill. ; |
||
| 504 | _aIncludes bibliographical references and index. | ||
| 650 | 0 |
_aSemiconductors _vTextbooks. |
|
| 650 | 0 |
_aNanotechnology _vTextbooks. |
|
| 650 | 0 |
_aMicrotechnology _vTextbooks. |
|
| 700 | 1 | _aGreiner, Andreas. | |
| 856 | 4 | 2 | _uhttp://www.loc.gov/catdir/description/wiley0310/2002512459.html |
| 856 | 4 | 1 | _uhttp://www.loc.gov/catdir/toc/wiley031/2002512459.html |
| 942 | _cBK | ||