000			00309nam a2200133Ia 4500
001			18407
008			170722s9999 xx 000 0 und d
100			_aHolland L.
245			_aaccum deposition of thin films, eng /
260			_c1958
653			_aCrystal
653			_aProperties of Matter
942			_cGEN
999			_c21622 _d21622