| 000 | 00336nam a22001217a 4500 | ||
|---|---|---|---|
| 020 | _a0195105087 | ||
| 082 |
_a621.38152 _bCAM.S |
||
| 100 | _aCampbell, Stephen A | ||
| 245 | _aScience and engineering of microelectronic abrication | ||
| 260 |
_aNew York _bOUP _c1996 |
||
| 490 | _aOxford series in electrical engineering | ||
| 942 | _cBK | ||
| 999 |
_c213502 _d213502 |
||