000 00295nam a22001097a 4500
020 _a0125112211
082 _a620.195
_bMUR.I
100 _aMurarka, S P,Ed.
245 _aInterlayer dielectrics for semiconductor technologies
260 _aAmsterdam
_bElsevier Academic Press
_c2003
942 _cBK
999 _c213403
_d213403