000 | 00295nam a22001097a 4500 | ||
---|---|---|---|
020 | _a0125112211 | ||
082 |
_a620.195 _bMUR.I |
||
100 | _aMurarka, S P,Ed. | ||
245 | _aInterlayer dielectrics for semiconductor technologies | ||
260 |
_aAmsterdam _bElsevier Academic Press _c2003 |
||
942 | _cBK | ||
999 |
_c213403 _d213403 |