000 00287nam a22000977a 4500
082 _a620.5
_bTAN.N
100 _aNorio Taniguchi, Ed.
245 _aNanotechnology : Integrated processing systems for ultra-precision and ultra fine products
260 _aNew Delhi
_bOUP
_c1996
942 _cBK
999 _c213096
_d213096