000 00414nam a2200157Ia 4500
001 160134
008 170722s9999 xx 000 0 und d
020 _a9788181285058
245 _aMicromanufacturing and nanotechnology /
260 _aBerlin :
_bSpringer Verlag ,
_c2006.
300 _axxiii+468
653 _aNanotechnology
700 _aMahalik , N. P.
_eeditor.
923 _d20081231
_n259
942 _cGEN
999 _c139866
_d139866