| 000 | 00378nam a2200145Ia 4500 | ||
|---|---|---|---|
| 001 | 136507 | ||
| 008 | 170722s9999 xx 000 0 und d | ||
| 020 | _a007048709X | ||
| 100 | _aHsu, Tai-ran | ||
| 245 | _aMems and microsystems design and manufacture / | ||
| 260 |
_aNew Delhi : _bTata McGraw Hill , _c2002. |
||
| 300 | _a436 p. | ||
| 923 |
_d20031209 _nTY152 |
||
| 942 | _cGEN | ||
| 999 |
_c127614 _d127614 |
||