000 00473nam a2200181Ia 4500
001 136598
008 170722s9999 xx 000 0 und d
020 _a9814126942
100 _aGhandhi, Sorab K.
245 _aVLSI fabrication principles
_bSilicon and gallium arsendie /
250 _a2nd ed.
260 _bJohn Wiley and sons ,
_c2003.
300 _axxiv+834
653 _aCircuit
653 _aElectronics Engineering
923 _d20031022
_n078
942 _cTB
999 _c127070
_d127070