Reliability of MEMS / edited by Osamu Tabata and Toshiyuki Tsuchiya.
Material type: TextPublication details: Weinheim : Wiley-VCH, c2008.Description: xx, 303 p. : illISBN:- 9783527314942
- 3527314946
- 539.60113 BRA/R
Contents:
MEMS
Item type | Current library | Home library | Call number | Status | Date due | Barcode | |
---|---|---|---|---|---|---|---|
Book | Dept. of Optoelectronics Processing Center | Dept. of Optoelectronics | 539.60113 TAB/R (Browse shelf(Opens below)) | Available | DOP1823 |
"Testing of materials and devices"--Cover.
Includes bibliographical references and index.
MEMS
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