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Microlithography: Science and technology

By: Material type: TextTextSeries: Publication details: CRC Press, Boca Raton 2007Edition: 2Description: 848ISBN:
  • 9780824790240
Subject(s): DDC classification:
  • 621.381531 SUZ-M2
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Holdings
Item type Current library Home library Call number Status Date due Barcode
Book Book Dept. of Physics Processing Center Dept. of Physics 621.381531 SUZ-M2 (Browse shelf(Opens below)) Available PHY6091

Renjith Raj £79.99

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