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Mems and microsystems design and manufacture / by
Material type: Text Text; Format: print ; Literary form: Not fiction
Publication details: New Delhi : Tata McGraw Hill , 2002
Availability: Items available for loan: Kerala University Library (1)Call number: D65,3:4 P23.
MEMS and microsystems : design, manufacture, and nanoscale engineering / Tai-Ran Hsu. by
Edition: 2nd ed.
Material type: Text Text
Publication details: Hoboken, N.J. : John Wiley, c2008
Availability: Not available: Dept. of Optoelectronics: Checked out (1).
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