Irene, Eugene. A. <br/><br/>
Surfaces, Interfaces, and Thin Films for Microelectronics/ 

 - New Jersey:  John Wiley & Sons,  2008. 
 - xiii, 515p. 
<br/><br/><label>ISBN: </label>9780470174470 
<br/><br/><label>Dewey Class. No.: </label>621.381