TY  - BOOK
AU  - Madou, Marc J.
TI  - Fundamentals of Microfabrication and Nanotechnology vol.III: From MEMS to Bio-MEMS and Bio- NEMS
SN  - 978-1-4200-5516-0
U1  - 681.2 
PY  - 2012///
CY  - London
PB  - CRC PRESS
ER  -