Madou, Marc J. <br/><br/>
Fundamentals of Microfabrication and Nanotechnology vol.III:  From MEMS to Bio-MEMS and Bio- NEMS; 
Madou, Marc J. 
 - London,  CRC PRESS,  2012. 
 - IX,638P., 
<br/><br/><label>ISBN: </label>978-1-4200-5516-0 
<br/><br/><label>Dewey Class. No.: </label>681.2  / MAD/F