TY  - BOOK
AU  - Madou, Marc J
TI  - Fundamentals of Microfabrication and Nanotechnology: Solid- state Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology
SN  - 978-1-4200-5511-5
U1  - 681.2 
PY  - 2012///
CY  - London
PB  - CRC Press
ER  -