Madou, Marc J <br/><br/>
Fundamentals of Microfabrication and Nanotechnology:  Solid- state Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology; 
Madou, Marc J 
 - London;  CRC Press,  2012. 
 - vii,641p. 
<br/><br/><label>ISBN: </label>978-1-4200-5511-5 
<br/><br/><label>Dewey Class. No.: </label>681.2  / MAD/F