Ion implantation/ 
by G. Dearnaley [and others] 
 - Amsterdam,  New York,  North-Holland Pub. Co.;  :American Elsevier,  ,1973. 
 - xv, 802 p. with illus. 
<br/><br/>Includes bibliographies. 
<br/><br/><label>ISBN: </label>0444104887 (American Elsevier) 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Ion implantation.
<br/><br/><label>Dewey Class. No.: </label>530.41 DEA/I