Suzuki, Kazuaki, Ed.; Smith, Bruce W, Ed. <br/><br/>
Microlithography: Science and technology 

 - 2 
 - CRC Press, Boca Raton  2007 
 - 848 
 - .
<br/><br/>  
<br/><br/><label>ISBN: </label>9780824790240  £79.99 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Metal oxide semiconductors, Complementary--Design and construction
<br/><br/><label>Dewey Class. No.: </label>621.381531  SUZ-M2