Campbell, Stephen A <br/><br/>
Science and engineering of microelectronic fabrication 

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 - Oxford University Press, New York  1996 
 - 536 
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<br/><br/>  
<br/><br/><label>ISBN: </label>9780195105087  295 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductor devices; Electronics engineering; Applied physics
<br/><br/><label>Dewey Class. No.: </label>621.38152  CAM-S