Powell, Ronald A, Ed. <br/><br/>
Dry etching for microelectronics 

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 - North-Holland Physics Publishing Co., Amsterdam  1984 
 - 299 
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<br/><br/><label>ISBN: </label>  
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductors--Etching
<br/><br/><label>Dewey Class. No.: </label>621.38173  POW-D