Tandon, U S; Khokle, W S <br/><br/>
Patterning of material layers in submicron region 

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 - Wiley Eastern Limited, New Delhi  1993 
 - 183 
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<br/><br/><label>ISBN: </label> 450 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Lithography, Electron beam
<br/><br/><label>Dewey Class. No.: </label>621.381531  TAN-P