Elliott, David J <br/><br/>
Microlithography: Process technology for IC fabrication 

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 - Mcgraw Hill Book Co., London  1986 
 - 378 
 - .
<br/><br/>  
<br/><br/><label>ISBN: </label> $52 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Circuits; Electronics engineering; Applied physics
<br/><br/><label>Dewey Class. No.: </label>R  621.3817  ELL-M