TY  - BOOK
AU  - Ukita,H.
TI  - Micromechanical photonics
SN  - 3540313338 (hbk. alk. paper)
U1  - 621.36 
PY  - 2006///
CY  - Berlin
PB  - Springer-Verlag
KW  - Photonics
KW  - Microelectronics
KW  - Microelectromechanical systems
N1  - Includes bibliographical references (p. [227]-242) and index
ER  -