TY  - BOOK
AU  - Adams,Thomas M.
AU  - Layton,Richard A.
TI  - Introductory MEMS: fabrication and applications 
SN  - 9780387095103 (hbk.)
U1  - 621.381 ADA/I 
PY  - 2010///
CY  - New York
PB  - Springer
KW  - Microelectromechanical systems
KW  - Electronic apparatus and appliances
KW  - Transducers
KW  - MEMS
N1  - Includes bibliographical references and index; 1. Introduction -- 2. The substrate and adding material to it -- 3. Creating and transferring patterns- photolithography -- 4. Creating structures - micromachining -- 5. Solid mechanics -- 6. Thinking about modeling -- 7. MEMS transducers -- 8. Piezoresistive transducers -- 9. Capacitive transducers -- 10. Piezoelectric transducers -- 11. Thermal transducers -- 12. Introduction to microfluidics -- 13. Microfabrication laboratories
ER  -