Adams, Thomas M. <br/><br/>
Introductory MEMS :  fabrication and applications / 
Thomas M. Adams, Richard A. Layton. 
 - New York :  Springer,  c2010. 
 - xv, 444 p. :  ill. (some col.) ; 
<br/><br/>Includes bibliographical references and index. 
<br/><br/>1. Introduction -- 2. The substrate and adding material to it -- 3. Creating and transferring patterns- photolithography -- 4. Creating structures - micromachining -- 5. Solid mechanics -- 6. Thinking about modeling -- 7. MEMS transducers -- 8. Piezoresistive transducers -- 9. Capacitive transducers -- 10. Piezoelectric transducers -- 11. Thermal transducers -- 12. Introduction to microfluidics -- 13. Microfabrication laboratories. 
<br/><br/><label>ISBN: </label>9780387095103 (hbk.) 0387095101 (hbk.) 9780387095110 (ebk.) 038709511X (ebk.) 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems.<br/>Electronic apparatus and appliances.<br/>Transducers.<br/>MEMS.
<br/><br/><label>Dewey Class. No.: </label>621.381 ADA/I