Adams, Thomas M.
Introductory MEMS : fabrication and applications /
Thomas M. Adams, Richard A. Layton.
- New York : Springer, c2010.
- xv, 444 p. : ill. (some col.) ;
Includes bibliographical references and index.
1. Introduction -- 2. The substrate and adding material to it -- 3. Creating and transferring patterns- photolithography -- 4. Creating structures - micromachining -- 5. Solid mechanics -- 6. Thinking about modeling -- 7. MEMS transducers -- 8. Piezoresistive transducers -- 9. Capacitive transducers -- 10. Piezoelectric transducers -- 11. Thermal transducers -- 12. Introduction to microfluidics -- 13. Microfabrication laboratories.
9780387095103 (hbk.) 0387095101 (hbk.) 9780387095110 (ebk.) 038709511X (ebk.)
Microelectromechanical systems.
Electronic apparatus and appliances.
Transducers.
MEMS.
621.381 ADA/I