TY  - BOOK
AU  - Lin,Burn Jeng
TI  - Optical lithography: here is why 
SN  - 9780819475602
U1  - 621.381531 
PY  - 2009///
CY  - Bellingham, Wash.
PB  - SPIE
KW  - Microlithography
KW  - Semiconductors
KW  - Lasers
N1  - Includes index
ER  -