Lin, Burn Jeng, <br/><br/>
Optical lithography :  here is why / 
Burn J. Lin. 
 - Bellingham, Wash. :  SPIE,  c2009. 
 - xiv, 477 p. :  ill. ; 
<br/><br/> Includes index. 
<br/><br/><label>ISBN: </label>9780819475602 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microlithography.<br/>Semiconductors<br/>Lasers
<br/><br/><label>Dewey Class. No.: </label>621.381531