TY  - BOOK
AU  - Nishi,Yoshio
AU  - Doering,Robert
TI  - Handbook of semiconductor manufacturing technology
SN  - 0824787838 (alk. paper)
U1  - 621.38152 
PY  - 2000///
CY  - New York
PB  - Marcel Dekker
KW  - Semiconductors
KW  - Handbooks, manuals, etc
KW  - Semiconductor industry
N1  - Includes bibliographical references and index
UR  - http://www.loc.gov/catdir/enhancements/fy0647/00055564-d.html
ER  -