Handbook of semiconductor manufacturing technology / 
edited by Yoshio Nishi, Robert Doering ; assistant editor, Tim Wooldrige. 
 - New York :  Marcel Dekker,  c2000. 
 - xiv, 1157 p. :  ill. ; 
<br/><br/>Includes bibliographical references and index. 
<br/><br/><label>ISBN: </label>0824787838 (alk. paper) 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductors--Handbooks, manuals, etc.<br/>Semiconductor industry--Handbooks, manuals, etc.
<br/><br/><label>Dewey Class. No.: </label>621.38152