TY  - BOOK
AU  - Huff,Howard R.
TI  - Into the nano era
T2  - Springer series in materials science
SN  - 9783540745587 (hardcover : alk. paper)
U1  - 621.3815 
PY  - 2009///
CY  - Berlin
PB  - Springer
KW  - Integrated circuits
KW  - Silicon
KW  - Semiconductors
N1  - Includes bibliographical references and index
ER  -