Into the nano era / 
Howard Huff, editor. 
 - Berlin :  Springer,  c2009. 
 - xxviii, 343 p. :  ill. ; 
 - Springer series in materials science ; .
<br/><br/>Includes bibliographical references and index. 
<br/><br/><label>ISBN: </label>9783540745587 (hardcover : alk. paper) 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Integrated circuits<br/>Silicon<br/>Semiconductors
<br/><br/><label>Dewey Class. No.: </label>621.3815