Sinzinger, Stefan.
Microoptics /
Stefan Sinzinger, Jürgen Jahns.
- 2nd rev. and enlarged ed.
- Weinheim : Wiley-VCH, c2003.
- xiv, 433 p. : ill. ;
Previous ed.: 1999.
Includes bibliographical references and index.
LITHOGRAPHIC FABRICATION TECHNOLOGY-diffrctive micro optics--integrated wave guide optics--Micro optical system--array illuminator
3527403558
Integrated optics.
Optoelectronic devices.
Miniature electronic equipment.
621.381045