TY - BOOK AU - Mathia,Karl TI - Robotics for electronics manufacturing: principles and applications in cleanroom automation SN - 9780521876520 (hbk.) U1 - 629.892 PY - 2010/// CY - Cambridge, New York PB - Cambridge University Press KW - Robotics KW - Clean rooms KW - Manufacturing processes N1 - Includes bibliographical references and index ER -