CMOS-MEMS. Vol. 2:  Advanced Micro and Nanosystems/ 
edited by O.Brand and G.K.Fedder 
 - Germany  wiley-vch  
<br/><br/>material characterization 
<br/><br/><label>ISBN: </label>9783527310807 
<br/><br/><label>Dewey Class. No.: </label>621.3815 BRA/C