TY  - BOOK
AU  - Osten,Wolfgang
TI  - Optical inspection of microsystems
T2  - Optical science and engineering
SN  - 0849336821 (alk. paper)
U1  - 670.42/5 
PY  - 2007///
CY  - Boca Raton, FL
PB  - CRC/Taylor & Francis
KW  - Microelectromechanical systems
KW  - Quality control
KW  - Optical measurements
KW  - Industrial microscopy
N1  - Includes bibliographical references and index
UR  - http://www.loc.gov/catdir/enhancements/fy0648/2005046670-d.html
ER  -