TY  - BOOK
AU  - Fujita, H
TI  - Micromachines as tools for nanotechnology
SN  - 9798181282025
U1  - 620.115  FUJ-M 
PY  - 2004///
CY  - Springer (India) Pvt Ltd., New Delhi
KW  - Microelectromechanical systems
ER  -