Fujita, H <br/><br/>
Micromachines as tools for nanotechnology 

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 - Springer (India) Pvt Ltd., New Delhi  2004 
 - 211 
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<br/><br/><label>ISBN: </label>9798181282025  595 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems
<br/><br/><label>Dewey Class. No.: </label>620.115  FUJ-M