TY  - BOOK
AU  - Xi,Ning
AU  - Zhang,Mingjun
AU  - Li,Guangyong
TI  - Modeling and control for micro/nano devices and systems
T2  - Automation and control engineering
SN  - 9781466554054 (cloth : acidfree paper)
U1  - 621.4 
PY  - 2014///
CY  - Boca Raton
PB  - CRC Press
KW  - Microelectromechanical systems
KW  - Nanoelectromechanical systems
KW  - Systems biology
KW  - Technology
N1  - Includes bibliographical references and index
ER  -