TY  - BOOK
AU  - Hesketh,P.J.
TI  - BioNanoFluidic MEMS
T2  - MEMS reference shelf
SN  - 9780387462813 (alk. paper)
U1  - 620.115 
PY  - 2008///
CY  - New York
PB  - Springer
KW  - Microelectromechanical systems
KW  - Nanotechnology--OXIDE nanostructures--nanolithography--chemical sensor
KW  - Biotechnology
KW  - MEMS
N1  - Reprinted as softcover in 2010; Includes bibliographical references and index; Nanotechnology: retrospect and prospect / James D. Meindl -- Synthesis of oxide nanostructures / Chenguo Hu, Hong Liu, and Zhong Lin Wang -- Nanolithography / Raghunath Murali -- Nano/microfabrication methods for sensors and NEMS/MEMS / Peter J. Hesketh -- Micro- and nanomanufacturing via molding / Harry D. Rowland and William P. King -- Temperature measurement of  microdevices using thermoreeflectance and raman thermometry / Thomas Beechem and Samuel Graham -- Stereolithography and rapid prototyping / David W. Rosen -- Case studies in chemical sensor development / Gary W. Hunter, Jennifer C. Xu, and Darby B. Makel -- Engineered nanopores / Amir G. Ahmadi and Sankar Nair -- Engineering biomaterial interfaces through micro and nano-patterning / Joseph L. Charest and William P. King -- Biosensors micro and nano integration / Ravi Doraiswami
ER  -