TY - BOOK TI - Micromanufacturing and nanotechnology SN - 3540253777 (hd.bd.) U1 - 620.5 PY - 2006/// CY - Berlin, New York PB - Springer KW - Nanotechnology N1 - Includes bibliographical references and index UR - http://www.loc.gov/catdir/enhancements/fy0663/2005929276-d.html UR - http://www.loc.gov/catdir/enhancements/fy0818/2005929276-t.html ER -