TY  - BOOK
AU  - Sarkar,Jaydeep
TI  - Sputtering materials for VLSI and thin film devices
SN  - 9780815515937
U1  - 621.381 
KW  - Microelectronics
KW  - Cathode sputtering (Plating process)
KW  - Integrated circuits
KW  - Thin film devices
KW  - Flat panel displays
KW  - Sputtering (Physics)
N1  - Includes bibliographical references and index
ER  -