Sarkar, Jaydeep
Sputtering materials for VLSI and thin film devices /
Jaydeep Sarkar.
- x, 603 pages : illustrations ;
Includes bibliographical references and index.
9780815515937 0815515936
Microelectronics
Cathode sputtering (Plating process)
Integrated circuits
Thin film devices
Flat panel displays
Sputtering (Physics)
621.381