TY  - BOOK
AU  - Ohring,Milton
TI  - Materials science of thin films: deposition and structure 
SN  - 0125249756 (alk. paper)
U1  - 621.3815/2 
PY  - 2002///
CY  - San Diego, CA
PB  - Academic Press
KW  - Thin films
N1  - Includes bibliographical references and index
UR  - http://www.loc.gov/catdir/description/els031/2001089414.html
UR  - http://www.loc.gov/catdir/toc/els031/2001089414.html
UR  - http://www.e-streams.com/es0505/es0505_1873.htm
ER  -