Sarkar,Jayadeep <br/><br/>
Sputtering materials for VLSI and thin film devices 

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 -  William Andrew,Elsevier,Amsterdam  2014 
<br/><br/><label>ISBN: </label>9  13034.5 
<br/><br/><label>Dewey Class. No.: </label>R 621.381 SAR/S