Feldman,Martin,Ed. <br/><br/>
Nanolithography : the art of fabricating nanoelectronic and nanophotonic devices and systems 

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 -  Woodhead publihing ltd , Cambridge  2014 
<br/><br/><label>ISBN: </label>9  19175.0 
<br/><br/><label>Dewey Class. No.: </label>R 621.381 531 FEL/N