Madou,MarcJ <br/><br/>
Fundamentals of Microfabrication and nanotechnology:Solid-state physics,fluidics, and analytical techniques in micro and nanotechnology, Volume1 

 - 3 Edition 
 -  CRC Press  2012 
<br/><br/><label>ISBN: </label> For three  
<br/><br/><label>Dewey Class. No.: </label>620.5 MAD/F.1