TY  - BOOK
AU  - Korvink,J.G.
AU  - Greiner,Andreas
TI  - Semiconductors for micro- and nanotechnology: an introduction for engineers 
SN  - 3527302573
U1  - 621.38152 
PY  - 2002///
CY  - Weinheim
PB  - Wiley-VCH
KW  - Semiconductors
KW  - Textbooks
KW  - Nanotechnology
KW  - Microtechnology
N1  - Includes bibliographical references and index
UR  - http://www.loc.gov/catdir/description/wiley0310/2002512459.html
UR  - http://www.loc.gov/catdir/toc/wiley031/2002512459.html
ER  -