Korvink, J. G. <br/><br/>
Semiconductors for micro- and nanotechnology :  an introduction for engineers / 
Jan G. Korvink and Andreas Greiner. 
 - Weinheim :  Wiley-VCH,  c2002. 
 - 340 p. :  ill. ; 
<br/><br/>Includes bibliographical references and index. 
<br/><br/><label>ISBN: </label>3527302573 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductors--Textbooks.<br/>Nanotechnology--Textbooks.<br/>Microtechnology--Textbooks.
<br/><br/><label>Dewey Class. No.: </label>621.38152