Santos, Hector J. De Los <br/><br/>
Principles and applications of nanomems physics / 

 - New Delhi :  Springer (India) Pvt Ltd ,  2008. 
 - xv+253 
<br/><br/><label>ISBN: </label>9788181288530 
<br/><br/><label>Subjects--Index Terms: </label>Nano Mems Physics