TY  - BOOK
AU  - Leondes , Cornelius T.
TI  - Mems/nems: Hand bookTechniques and applications 
SN  - 0387245200
PY  - 2006///
CY  - New York
PB  - Springer Sci.Business.Media.Inc.
KW  - Medical Applications
N1  - 5V
ER  -